| 扫描电子显微镜样品常规处理镀膜技术的改进 |
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| 引用本文： | 陈伟之.扫描电子显微镜样品常规处理镀膜技术的改进[J].沈阳农业大学学报,2007,38(6):864-867. |
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| 作者姓名： | 陈伟之 |
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| 作者单位： | 沈阳农业大学,分析测试中心,沈阳,110161 |
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| 摘 要： | 扫描电子显微镜是观察研究试材表面微观、超微观结构的大型精密仪器。在观察研究试材前,要对试材表面进行镀金膜处理,此处理消耗材料成本十分昂贵,阻碍大数量样品的科学研究。几年来,沈阳农业大学分析测试中心根据生物、农业研究中微观试材的特点,用自主设计的铂合金靶和铜合金靶组合使用,替代国外同类专用产品,成本降低80%,对大数量样品的科学研究、试材处理的结果优于国外同类专用产品处理结果,为科学研究工作创造了有利条件。
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| 关 键 词： | 扫描电镜显微镜 铂合金靶 铜合金靶 镀金膜处理 处理成本 |
| 文章编号： | 1000-1700（2007）06-0864-04 |
| 收稿时间： | 2007-05-23 |
| 修稿时间： | 2007年5月23日 |
Study on Improvement of Deposition Technology in Scanning Electron Microscope Sample Regular Processing |
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| CHEN Wei-zhi.Study on Improvement of Deposition Technology in Scanning Electron Microscope Sample Regular Processing[J].Journal of Shenyang Agricultural University,2007,38(6):864-867. |
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| Authors: | CHEN Wei-zhi |
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| Abstract: | The scanning electron microscope(SEM) is a type of electron microscope capable of producing high-resolution images of a sample surface.In order to view non-conductive samples,the sample must be covered with a thin layer of a conductive material,however,the processing cost is extremely expensive resulting in hinderer on scientific research of the great quantity sample.For several years,by study the microscopic character of biological and agricultural materials,Analysis-testing Center of Shenyang Agricultural University used the combination of Pt/Au and Cu/Au to substite overseas similar special-purpose product.As a result,the processing cost decrease to 80% of original cost,and the processing result is better.The improved technology creates advantage for the research. |
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| Keywords: | scanning electron microscope Pt/Au target Cu/Au target deposition processing cost |
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