| 电子探针能谱测定膜厚的E_f理论 |
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| 引用本文： | 秦会斌,杨永德,于虹.电子探针能谱测定膜厚的E_f理论[J].浙江大学学报(农业与生命科学版),1998(Z1). |
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| 作者姓名： | 秦会斌 杨永德 于虹 |
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| 作者单位： | 杭州电子工业学院信息材料与器件实验室，电子部５２所 |
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| 摘 要： | 研究利用电子探针能谱（ＥＤＳ）检测薄膜厚度的技术。该技术的核心是：①确定特征ｘ射线的临界激发能Ｅｆ；②确定所采用的半经验公式。Ｅｆ方法是一种很好的估测膜厚的近似方法，具有很好的实用价值。文中还探讨了二种确定薄膜Ｅｆ的方法。
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| 关 键 词： | 薄膜 厚度 测量 EDS |
Theory of thickness determination of thin films by EDS Journal of Zhejiang Agricultural University |
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| Qin Huibin , Yang Yongde , Yu Hong.Theory of thickness determination of thin films by EDS Journal of Zhejiang Agricultural University[J].Journal of Zhejiang University(Agriculture & Life Sciences),1998(Z1). |
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| Authors: | Qin Huibin Yang Yongde Yu Hong |
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| Institution: | Qin Huibin 1, Yang Yongde 1, Yu Hong 2 |
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| Abstract: | The theory of the thickness determination of thin films by EDS was studied There are two key points One is the determination of critical exciting energy E f of character X ray Another is the determination of the semiexpirical formula for the thickness The method has an advantage over other methods and it possesses the practicability Two methods for determinating E f were discussed also |
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| Keywords: | film thickness measurement EDS |
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