| Dynamic Characteristic of Micromachined Arrayed Microphone |
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| 作者姓名： | XU Dao lian ZHONG Xian xing WU Zheng zhong CHEN Wen tao LI Xiao yi |
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| 摘 要： | Several kinds of microphone developed via silicon Micro Electro Mechanical System (MEMS) processes in recent years are investigated in this paper. The analysis and research of the merits and demerits of them show that: these conventional microphones mainly function as acoustic electric converters; the filtering against noise is implemented by a special filter circuit or a digital filter. Therefore, a design method for silicon micro array filter microphone is presented, where the filtering is achieved while converting signals. The effects of damping, silicon reed number and sensor element pair on dynamic characteristic are discussed; it follows that: Increasing damping can reduce microphone's sensitivity, while increasing silicon reed number can improve the sensitivity curve, furthermore, the implementation of the filter function is simultaneous with acquiring of the noise signal.
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| 关 键 词： | micromachine microphone filter |
| 修稿时间： | 2002/9/10 0:00:00 |
Dynamic Characteristic of Micromachined Arrayed Microphone |
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| XU Dao lian,ZHONG Xian xing,WU Zheng zhong,CHEN Wen tao,LI Xiao yi.Dynamic Characteristic of Micromachined Arrayed Microphone[J].Storage & Process,2002(12):28-30. |
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| Authors: | XU Dao lian ZHONG Xian xing WU Zheng zhong CHEN Wen tao LI Xiao yi |
| |
| Abstract: | Several kinds of microphone developed via silicon Micro Electro Mechanical System (MEMS) processes in recent years are investigated in this paper. The analysis and research of the merits and demerits of them show that: these conventional microphones mainly function as acoustic electric converters; the filtering against noise is implemented by a special filter circuit or a digital filter. Therefore, a design method for silicon micro array filter microphone is presented, where the filtering is achieved while converting signals. The effects of damping, silicon reed number and sensor element pair on dynamic characteristic are discussed; it follows that: Increasing damping can reduce microphone's sensitivity, while increasing silicon reed number can improve the sensitivity curve, furthermore, the implementation of the filter function is simultaneous with acquiring of the noise signal. |
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| Keywords: | micromachine microphone filter |
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